r S-band applications

Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications

1 min read · Fri, Apr 27 2012

r S-band applications Circuits PolyMUMPS

Amro Elshurafa, et al., "Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications." Micro & Nano Letters 7, (5), 2012, 419. In this Letter, the authors fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art single-layer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and